Instrumentation

Cambridge Nanotech S200 Atomic Layer Deposition (ALD) System

Capable of conformal deposition of oxide materials on planar and high aspect ratio substrates. More info on this instrument is available at http://www.cambridgenanotech.com/knowledgecenter

Other instrument descriptions coming soon

Lewis Research Group, Division of Chemistry and Chemical Engineering
Caltech 127-72, 1200 East California Boulevard, Pasadena, California 91125