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--- pubinstr [2011/11/30 13:47]
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+++ pubinstr [2013/06/22 20:16] (current)
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+====== Instrumentation ======
+=== Cambridge Nanotech S200 Atomic Layer Deposition (ALD) System ===
+Capable of conformal deposition of oxide materials on planar and high aspect ratio substrates.  More info on this instrument is available at
+[[http://www.cambridgenanotech.com/knowledgecenter]]
+=== Other instrument descriptions coming soon ===

		Lewis Research Group, Division of Chemistry and Chemical Engineering Caltech 127-72, 1200 East California Boulevard, Pasadena, California 91125