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pubinstr [2011/11/30 13:47]
pubinstr [2013/06/22 20:16] (current)
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 +====== Instrumentation ======
 +  ​
 +=== Cambridge Nanotech S200 Atomic Layer Deposition (ALD) System ===
 +Capable of conformal deposition of oxide materials on planar and high aspect ratio substrates. ​ More info on this instrument is available at
 +=== Other instrument descriptions coming soon ===

Lewis Research Group, Division of Chemistry and Chemical Engineering
Caltech 127-72, 1200 East California Boulevard, Pasadena, California 91125